• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The present invention relates to a method for producing a metal pressure measuring cell (1) and a metal pressure measuring cell (1) with a base body (3), a metal membrane (5) arranged on the base body (3), wherein between the membrane (5) and a membrane chamber (51) is formed in the base body (3), a pressure sensor (7) arranged in a sensor chamber (71) of the base body (3), a connecting channel (9) being provided between the membrane chamber (51) and the sensor chamber (71). and the chambers are filled with a pressure transmitter medium for transmitting a pressure acting on the membrane (5), characterized in that the membrane (5) has a surface structure which, in a plan view, is an outer contour of an entry surface of the connecting channel (9) into the membrane chamber (51) at least overlaps.
    公开号:CH717608A2
    申请号:CH70004/21
    申请日:2021-07-01
    公开日:2022-01-14
    发明作者:Epting Julian；Huber Jochen
    申请人:Grieshaber Vega Kg；
    IPC主号:
    专利说明:

    The present invention relates to a metallic pressure measuring cell according to the preamble of patent claim 1 and a method for producing a metallic pressure measuring cell having the features of patent claim 12.
    Various forms of pressure measuring cells are known from the prior art. Such pressure measuring cells are used in pressure measuring devices and convert a pressure into an electrical signal that can then be processed further. Pressure measuring cells are differentiated according to the underlying measuring principle, the materials oriented towards the process and whether absolute or relative pressures can be measured.
    [0003] Accordingly, there are, for example, capacitive pressure measuring cells, which detect a change in pressure due to deformation of a membrane and a resulting change in capacitance, resistive and piezoresistive pressure measuring cells, in which deformation of a membrane is detected, for example, by means of strain gauges and from a change in resistance of the strain gauges on the Pressure is closed, and piezoelectric pressure measuring cells that use the piezoelectric effect to determine pressure.
    The distinction between the process-oriented materials, ie the materials that come into contact with the process environment and the process media, usually distinguishes between metallic and ceramic pressure measuring cells, with one having a metallic membrane and the other having a ceramic membrane . For production and measurement reasons, a base body of the pressure measuring cell is often made of the same material as the membrane. In terms of manufacturing technology, it is often easier to create a connection between the same or similar materials than between different materials. In terms of metrology, it is advantageous to use materials with similar or ideally identical thermal expansion coefficients - this is also easier to achieve with the same or similar materials.
    [0005] Whether absolute or relative pressures can be measured usually depends on whether a second pressure, for example an external pressure, is supplied to the back of the membrane, or whether the back of the membrane is evacuated.
    The present application is based on a metal pressure measuring cell with a metal base, a metal membrane arranged on the base body. A membrane chamber is formed between the membrane and the base body, which is connected via a connecting channel to a sensor chamber in which a pressure sensor is arranged. The chambers and the connecting channel are filled with a pressure transmitter medium.
    The actual pressure sensor is usually formed by a silicon chip. This chip consists of a membrane structured with piezoresistive resistors, which bulges under pressure. The piezo chip is very sensitive to external influences and must therefore be hermetically encapsulated in most cases and is therefore installed pressure-tight in a stainless steel housing, which is closed at the front with a thin stainless steel membrane and thus forms the membrane chamber and the sensor chamber.
    The chambers are filled with the isolating medium, typically a synthetic oil. With such a sensor, therefore, only the metallic membrane, in this case made of stainless steel, is in contact with the process and the process pressure is transmitted to the chip membrane via the oil.
    In order to keep temperature influences on the pressure measurement as low as possible, it is necessary to keep the volume in the chambers and in particular the volume of the diaphragm chamber as small as possible. In addition, it is necessary for the metal membrane to be easily deflectable in the axial direction but comparatively stiff in the radial direction.
    In the prior art, this is achieved in that the membrane has a wavy contour in a cross-section, which is a deformation in the axial direction, i.e. in the direction in which the compressive force acts on the membrane, preferred and thus as stiff as possible in the radial direction. In order to keep the volume of the chamber as small as possible, a surface of the base body facing the membrane has a contour adapted thereto. In terms of manufacturing technology, it is advantageous if the part of the base body that faces the membrane is shaped accordingly and the membrane, only when it is attached to the base body, is molded from this shape of the base body. In concrete terms, the membrane is arranged on the base body, for example welded to it and then pressed onto the base body and shaped by it. This can be done, for example, by a stamp or by applying an overpressure.
    In this molding not only the waveform of the membrane-facing surface of the base body is molded, but also the part in which the connecting channel between the membrane chamber and the sensor chamber opens into the membrane chamber. This molding of the mouth of the connecting channel can result in the membrane being molded into the connecting channel in such a way that it is closed by the membrane. The membrane forms a kind of plug that closes the mouth of the connecting channel and thus makes subsequent filling of the chambers with the pressure transmitter medium more difficult or impossible.
    In the prior art, the membrane is pulled out of the mouth of the connecting channel again by applying a negative pressure or is provided with the desired contour before being connected to the base body.
    [0013] By applying a negative pressure, however, the membrane is again deformed in the opposite direction, so that minimizing the volume of the membrane chamber is not optimal. If the membrane is shaped before it is connected to the base body, deviations can occur both in the shape and in the alignment of the membrane relative to the base body, so that minimizing the volume of the membrane chamber is not optimal with this procedure either.
    It is the object of the present invention to specify a metallic pressure measuring cell and a method for producing such a pressure measuring cell in which the disadvantages of the prior art are avoided.
    [0015] This object is achieved by a metallic pressure measuring cell having the features of patent claim 1 and a method for producing a metallic pressure measuring cell having the features of patent claim 12.
    [0016]Advantageous developments are the subject of dependent patent claims.
    A metal pressure measuring cell according to the invention with a base body, a metal membrane arranged on the base body, a membrane chamber being formed between the membrane and the base body, a pressure sensor arranged in a sensor chamber of the base body, a connecting channel being formed between the membrane chamber and the sensor chamber and the chambers are filled with a pressure transmitter medium for transmitting a pressure acting on the membrane, is characterized in that the membrane has a surface structure which, in a top view, at least overlaps an outer contour of an entry surface of the connecting channel into the membrane chamber.
    A surface structure within the meaning of the present application is a roughness that goes beyond the natural surface roughness of the material of the membrane or an additional structure introduced into the membrane by depressions or elevations. In particular, these are surface structures that are introduced into the membrane before it is connected to the base body.
    In this way, a surface of the membrane is created which prevents sealing of an inlet opening of the connecting channel into the membrane chamber. The surface structure ensures that at least a first amount of pressure transmitter medium always penetrates into the membrane chamber and the membrane is lifted and filled by the pressure of the pressure transmitter medium during filling.
    In the present application, directional information is defined as follows: the membrane defines a membrane plane which is spanned by a peripheral connection of the membrane to the base body. Starting from this plane of the membrane, an axial direction is defined by a surface normal to the plane of the membrane. In a plan view of the membrane plane, the radial direction extends from a center point of the membrane. In top view means looking in the axial direction onto the membrane of the measuring cell. A cross section is to be understood as a section with a plane spanned by the axial direction and the radial direction.
    The membrane preferably has a circular outer contour in plan view.
    In a preferred embodiment, the membrane can have at least one channel which, in a top view, intersects the outer contour of the entry surface of the connecting channel into the membrane chamber at least once. Due to its configuration as a depression opposite the membrane surface, such a channel ensures that pressure-transmitting medium penetrates into the membrane chamber and fills it even if the membrane is deformed into the connecting channel. Channels can be introduced into the membrane in a particularly simple manner and thus represent a cost-effective variant for a surface structure according to the invention.
    In order to make the volume of the membrane chamber as small as possible, it makes sense if the membrane has a surface contour corresponding to a wall of the base body directly opposite the membrane in a section perpendicular to a membrane plane. Such a corresponding surface structure can be achieved by direct molding of a surface shape of the base body.
    [0024] Such an impression can be made, for example, in that the membrane is subjected to an overpressure, for example by a gas or a liquid, and is thus pressed against the surface of the base body facing it. Due to the small thickness of the membrane, it undergoes plastic deformation and adopts the surface contour of the base body.
    The surface contour is advantageously configured in a wavy manner for this purpose. A wavy contour allows flexibility of the membrane in the axial direction and rigidity of the membrane in the radial direction. It is advantageous if the surface contour has a cosine profile in a cross section, starting from a center point of the membrane. This means that the contour has a crest at the center point, which counteracts a sealing of the connecting channel, which usually opens centrally into the membrane chamber.
    The at least one channel is preferably designed to run in the radial direction, at least in sections, in a top view of the membrane. In one embodiment, the at least one channel runs completely in the radial direction.
    In one variant, the at least one channel can be designed in a spiral shape at least in sections in a plan view of the membrane. Such a spiral configuration has the advantage that it overlays a wavy contour of the membrane and is therefore less noticeable than channels running in the radial direction.
    In order to ensure that the membrane chamber is reliably filled, it is advantageous if the at least one channel, measured starting from a center point of the membrane in plan view, is formed up to at least 1/4, in particular at least 1/3, of a radius of the membrane. It is pointed out that only the extension of the channel is measured starting from the center point of the membrane. The channel itself does not necessarily have to begin at the midpoint of the membrane. In particular, when a plurality of channels are provided, it is even advantageous if these are not formed beginning at the center point of the membrane, since the membrane could otherwise be weakened at this point due to multiple processing.
    It can be advantageous if the membrane has at least 2, preferably at least 3, 4, 6 or 8 channels. A plurality of channels can ensure that the membrane chamber is not sealed off by the molding of the surface contour of the base body in the area of the entry of the connecting channel.
    Overall, it is advantageous if the channels, if several channels are provided, do not intersect in order to prevent weakening of the membrane. Additionally or alternatively, it is advantageous if the surface of the membrane facing the base body is roughened at least in sections. In particular, it is advantageous if the surface of the membrane facing the base body is roughened in a region that overlaps the outer contour of the entry surface of the connecting channel into the membrane chamber when viewed through.the pressure sensor can be designed as a piezo sensor, in particular a pressure sensor that operates piezoelectrically or piezoresistively.
    The connecting channel preferably opens centrally into the membrane chamber. A centric opening of the connecting channel into the membrane chamber results in a symmetrical structure, which is particularly advantageous with regard to thermally or otherwise induced stresses.
    A method according to the invention for producing a metallic pressure measuring cell according to one of the preceding claims has the following steps:Providing a base body with a membrane chamber with a predetermined surface contour, a sensor chamber and a connecting channel between the membrane chamber and the sensor chamber,Providing a metallic membrane with at least one surface structure which, in a plan view, at least overlaps an outer contour of an entry surface of the connecting channel into the membrane chamber,Fastening the metallic membrane to the base body,Molding the surface contour of the base body on the membrane andFilling of at least the membrane chamber, sensor chamber and connecting channel with a diaphragm seal medium.
    The fact that the metallic membrane has at least one surface structure which, in a plan view, at least overlaps an outer contour of an entry surface of the connection channel into the membrane chamber, means that a junction of the connection channel is not sealed when the surface contour of the base body is molded. This ensures that the diaphragm chamber can be filled with diaphragm seal medium. Since the surface structure of the membrane is introduced into a surface of the membrane facing the base body, the surface structure is introduced into the membrane before it is connected to the base body.
    The surface structure preferably includes at least one channel that is introduced into the membrane. Such a channel can be introduced into the membrane in particular by a machining process, in particular by milling, turning or engraving. For example, the at least one channel can already be introduced into the membrane during its manufacture.
    As an alternative to a machining process, the at least one channel can be introduced into the membrane by a forming process, in particular by embossing. This can be advantageous in particular if the membrane is purchased as a purchased part or if one cannot intervene in the production process of the membrane for other reasons. This is particularly advantageous if subsequent machining of the membrane, which typically has a thickness of between 0.01 mm and 0.2 mm, is not possible for manufacturing reasons.
    In one embodiment, the membrane is welded to the base body. The membrane can be welded to the base body, for example, by laser welding or resistance welding.
    Additionally or alternatively, the surface structure can be produced by roughening, in particular sandblasting and/or laser processing. A roughened surface avoids a sealing effect through the membrane when molding the surface contour of the base body. In addition to channels or as an alternative to this, filling of the membrane chamber can thus be ensured.
    Preferred embodiments, features and properties of the proposed field device correspond to those of the proposed method and vice versa.
    [0039] Advantageous refinements and variants of the invention result from the dependent claims and the following description. The features listed individually in the subclaims can be combined with one another in any technically meaningful way, as well as with the features explained in more detail in the following description and represent other advantageous embodiment variants of the invention.
    The present invention is explained in detail below using exemplary embodiments with reference to the attached figures. 1 shows a metal pressure measuring cell according to the present application, FIG. 2 shows a first exemplary embodiment of a membrane according to the present application, FIG. 3 shows a second exemplary embodiment of a membrane according to the present application, FIG. 4 shows a third exemplary embodiment of a membrane according to the present application and FIG 5 in a schematic representation two steps of the filling of the pressure measuring cell with a pressure transmitter medium.
    In the figures, unless otherwise stated, the same reference symbols denote the same or corresponding components with the same function.
    Figure 1 shows an embodiment of a metallic pressure measuring cell 1 according to the present application in a cross section.
    The pressure measuring cell 1 essentially has a metal base body 3 , a metal membrane 5 arranged on the front side in the axial direction A on the base body 3 , and a pressure sensor 7 arranged in a sensor chamber 71 formed in the base body 3 .The sensor chamber 71 is in fluid communication via a connecting channel 9 with a membrane chamber 51 formed between the base body 3 and the membrane 5 .
    The sensor chamber 71 is closed in the rear direction by a closure element 80, the closure element 80 having a plurality of cable bushings. The pressure sensor 7 is arranged in the sensor chamber 71 . The pressure sensor 7 has a sensor chip 73 as a pressure-sensitive element, which is arranged on the closure element 80 via a sensor carrier 75 . The sensor chip 73 is contacted at the front by a front-side contact 77 and at the rear by a rear-side contact 79, which are each passed through one of the passages through the closure element 80. A rear part of a membrane of the sensor chip 73 can be pressurized either with an ambient pressure or a reference pressure via a pressure compensation line 72, which is also routed through the closure element 80 to the rear of the sensor chip 73, or the cavity behind the sensor chip 73 can be evacuated, so that a absolute pressure measurement (reference pressure is the vacuum) can be carried out.
    In the exemplary embodiment illustrated in FIG. 1, the closure element 80 also has a filling opening 11 with a pipe section arranged thereon, via which the sensor chamber 71, the connecting channel 9 and the diaphragm chamber 51 can be filled with a pressure transmitter medium, for example a synthetic oil. In the representation of FIG. 1, however, this pressure transmitter medium 13 has not yet been introduced for the sake of better clarity.
    In the present exemplary embodiment, the membrane 5 is connected to the base body 3 via a peripheral connection 57, in this case a weld. In the present cross-sectional illustration, the membrane 5 has a wavy surface contour which is designed to correspond to a surface contour of a wall of the base body 3 facing the membrane 5 . This wavy surface contour 55 ensures that the membrane 5 is flexible in the axial direction A, whereas in the radial direction R the greatest possible rigidity is achieved.The surface contour 55 of the membrane 5 is transferred from the base body 3 to the membrane 5 during the manufacture of the pressure measuring cell 1 . For this purpose, the membrane 5 is subjected to excess pressure from the front after it has been attached to the base body 3 , so that it is molded into the membrane bed formed by the base body 3 .
    FIG. 2 shows a first exemplary embodiment of a membrane 5 as can be used in a pressure measuring cell 1 according to FIG.
    The membrane 5 is shown in Figure 2 in a plan view from below, i. H. shown looking in the axial direction and viewed from the base body 3 of the pressure measuring cell 1 .
    For the purpose of illustration, an entry surface 91 is shown in the center of the diaphragm 5, with which the connecting channel 9 enters the diaphragm chamber 51 through the base body 3. When the membrane 5 is pressurized to mold the surface contour of the base body 3 , this entry surface 91 is also shaped onto the membrane 5 , so that this entry requirement 91 or its outer contour is clearly recognizable on the membrane 5 . The wavy surface contour 55 of the membrane 5, as it is transferred to the membrane 5 by the deformation of the surface contour of the base body 3, is not shown in FIG. 2 for the sake of better clarity.
    In order to ensure that the diaphragm chamber 51 is filled with pressure-transmitting medium 13, the diaphragm 5 in the exemplary embodiment illustrated in FIG. 2 has a surface structure 53 designed as channels. In the present exemplary embodiment, the membrane 5 has eight channels 53 running in the radial direction R and each arranged at an angle of 45° to one another.
    The channels 53 are dimensioned in such a way that they extend outwards in the radial direction R by about a third of a radius r of the membrane 5 .
    The channels 53 are introduced into a surface of the membrane 5 before it is connected to the base body 3 of the pressure measuring cell 1 . During the deformation of the membrane bed, the channels 53 previously introduced into the membrane surface remain intact, so that when the pressure measuring cell 1 is subsequently filled with the pressure transmitter medium 13, this can flow through the channels 53 into the membrane chamber 51 and reliably fill it.
    Figure 3 shows a second embodiment of a membrane 5 according to the present application.
    The membrane 5 shown in FIG. 3 can also be used in a pressure measuring cell 1, as shown by way of example in FIG. In contrast to the exemplary embodiment according to FIG. 2, in the present exemplary embodiment the surface structure 53 of the membrane 5 is formed by a single, spirally running channel. In the bottom plan view shown, channel 53 spirals outward from a point within entry surface 91 of the connecting channel. Due to the spiral configuration of the channel 53, the surface structure 53 approximates the surface contour 55 of the membrane 5 and overlaps it, so that the channel 53 formed in this way has only a small influence on the flexibility of the membrane 5 in the axial direction and the rigidity in the radial direction.
    FIG. 4 shows a third exemplary embodiment of a membrane 5 according to the present application in a plan view from below.
    Like the membranes in FIGS. 2 and 3, the membrane according to FIG. 4 can also be used in the pressure measuring cell 1 according to FIG. In the exemplary embodiment shown in FIG. 4, the surface structure 53 of the membrane 5 is produced by roughening the membrane surface in the area of the shaded area. The surface of the membrane 5 is significantly increased in this area by sandblasting compared to the original surface accuracy of the membrane 5 so that it is ensured that when the pressure measuring cell 1 is filled with a pressure transmitter medium 13 it penetrates into the membrane chamber 51 .
    It should be noted at this point that the surface of the membrane 5 can also be roughened in addition to introducing channels, as was described in connection with FIGS.
    FIG. 5 shows a schematic representation of two steps in the manufacturing process of the pressure measuring cell 1 according to FIG.
    In a first step of a method for producing a metal pressure measuring cell 1 according to the present application, a metal base body with a membrane with a predetermined surface contour, a sensor chamber 71 and a connecting channel 9 between the membrane chamber 51 and the sensor chamber 71 is provided. Furthermore, a metallic membrane 5 is provided, which has at least one surface structure 53 which, in a top view, at least overlaps an outer contour of the entry surface 91 of the connecting channel 9 into the membrane chamber 51 . In a next step, the metallic membrane 5 is attached to the base body 3 and in a further step a surface contour of the base body 3 is applied to the membrane. In a further step, the pressure sensor 7 is arranged in the sensor chamber 71 and this is closed at the rear by means of a closure element 80 . In a last step, the membrane chamber, the sensor chamber and the connecting channel are filled with the pressure transmitter medium 13 . This step is shown in Figures 5a) and 5b).
    As can be seen from figure and number 5a), the entire sensor 1 is evacuated in a vacuum chamber in a first partial step, so that there is a vacuum both in the sensor chamber 71 and in the membrane chamber 51 and also in the vicinity of the pressure measuring cell 1. As soon as the pressure measuring cell 1 has been appropriately evacuated, the pipeline connected to the filling opening 11 is immersed in a container with pressure transmitter medium 13 and the ambient pressure of the pressure measuring cell 1 is regulated back to normal pressure. Due to the negative pressure prevailing in the sensor chamber 71, the membrane chamber 51 and the connecting channel 9, the pressure transmitter medium 13 is now sucked into the chambers 51,71 of the pressure measuring cell 1, so that the chambers 51,71 are completely filled with pressure transmitter medium number 13. Finally, the filling opening 11 can be closed and the pressure measuring cell 1 can thus be hermetically sealed. The previously described surface structure 53 of the membrane 5 also reliably fills the cavities of the membrane chamber 51 shown in FIG.
    Reference List
    1 pressure measuring cell 3 base body 5 membrane 7 pressure sensor 9 connection channel 11 filling opening 13 diaphragm seal medium 51 membrane chamber 53 surface structure/channel 55 surface contour 57 connection 71 sensor chamber 72 pressure equalization 73 sensor chip 75 sensor carrier 77 front contact 79 rear contact 80 closure element 91 entry surface A axial direction R radial direction r radius
    权利要求:
    Claims (17)
    [1]
    1. Metallic pressure measuring cell (1) with a base body (3), a metal membrane (5) arranged on the base body (3), a membrane chamber (51) being formed between the membrane (5) and the base body (3), a pressure sensor (7) arranged in a sensor chamber (71) of the base body (3), a connecting channel (9) being formed between the diaphragm chamber (51) and the sensor chamber (71) and the chambers having a pressure transmitter medium (13) for transmitting a the membrane (5) is filled to the pressurecharacterized in thatthe membrane (5) has a surface structure (53) which, in a plan view, at least overlaps an outer contour of an entry surface (91) of the connecting channel (9) into the membrane chamber (51).
    [2]
    2. Metallic pressure measuring cell (1) according to claim 1,characterized in thatthe membrane (5) has at least one channel which, in a top view, intersects the outer contour of the entry surface (91) of the connecting channel (9) into the membrane chamber (51) at least once.
    [3]
    3. Metallic pressure measuring cell (1) according to one of the preceding claims,characterized in thatthe membrane (5) in a cross section has a surface contour (55) corresponding to a wall of the base body (3) directly opposite the membrane (5).
    [4]
    4. Metallic pressure measuring cell (1) according to claim 3,characterized in thatthe surface contour (55) has a cosine profile.
    [5]
    5. Metallic pressure measuring cell (1) according to one of claims 2 to 4,characterized in thatthe at least one channel is designed to run at least in sections in the radial direction (R).
    [6]
    6. Metallic pressure measuring cell (1) according to one of claims 2 to 5,characterized in thatthe at least one channel is designed spirally, at least in sections, in a top view of the membrane (5).
    [7]
    7. Metallic pressure measuring cell (1) according to one of claims 2 to 6,characterized in thatthe at least one channel is formed starting from a center point of the membrane (5) in plan view up to at least 1/4, in particular at least 1/3 of a radius (r) of the membrane (5).
    [8]
    8. Metallic pressure measuring cell (1) according to one of claims 2 to 7,characterized in thatthe membrane (5) has at least 2, preferably at least 3, 4, 6 or 8 channels.
    [9]
    9. Metallic pressure measuring cell (1) according to one of the preceding claims,characterized in thatthe surface of the membrane (5) is roughened at least in sections.
    [10]
    10. Metallic pressure measuring cell (1) according to one of the preceding claims,characterized in thatthe pressure sensor (7) is designed as a piezo sensor.
    [11]
    11. Metallic pressure measuring cell (1) according to one of the preceding claims,characterized in thatthe connecting channel (9) opens centrally into the diaphragm chamber (51).
    [12]
    12. Method for producing a metallic pressure measuring cell (1) according to one of the preceding claims, with the following steps:- Providing a base body (3) with a membrane chamber (51) with a predetermined surface contour (55), a sensor chamber (71) and a connecting channel (9) between the membrane chamber (51) and the sensor chamber (71),- Providing a metallic membrane (5) with at least one surface structure (53) which in a plan view at least overlaps an outer contour of an entry surface (91) of the connecting channel (9) into the membrane chamber (51).- Attaching the metallic membrane (5) to the base body (3),- Molding the surface contour (55) of the base body (3) on the membrane (5) and- Filling of at least the membrane chamber (51), sensor chamber (71) and connecting channel (9) with a pressure transmitter medium (13).
    [13]
    13. The method according to claim 12,characterized in thatthe surface structure (53) comprises at least one channel which is introduced into the membrane (5).
    [14]
    14. The method according to claim 13,characterized in thatthe at least one channel is introduced into the membrane (5) by a machining process, in particular by milling, turning or engraving.
    [15]
    15. The method according to claim 13,characterized in thatthe at least one channel is introduced into the membrane (5) by a forming process, in particular by embossing.
    [16]
    16. The method according to any one of claims 12 to 15,characterized in thatthe membrane (5) is welded to the base body (3).
    [17]
    17. The method according to claims 12 to 16,characterized in thatthe surface structure (53) is produced at least partially by roughening, in particular sandblasting and/or laser processing.
    类似技术:
    公开号 | 公开日 | 专利标题
    EP2300739B1|2012-01-18|Chemical seal and pressure measuring device having such a seal
    EP0394632A1|1990-10-31|Pressure sensor and method of fabricating the same
    EP1295096B1|2007-06-13|Pressure transmitter
    EP3314228B1|2019-09-11|Pressure transmission module and pressure sensor having a pressure transmission module
    DE112011101128T5|2013-02-07|Structure with a groove for fixing in a mold and sealing media
    EP2659248B1|2015-09-23|Pressure sensor having a compressible element
    CH703737A1|2012-03-15|PRESSURE SENSOR with piezoresistive sensor CHIP ELEMENT.
    EP1946060A1|2008-07-23|Pressure sensor for hydraulic media in motor vehicle braking systems and use thereof
    DE102017216418A1|2018-04-05|An elongated, flat polygonal cavity pressure sensing device
    DE10130375B4|2009-01-29|Differential Pressure Sensor
    EP2335039B1|2016-05-18|Sensor arrangement, method for operating a sensor arrangement and method for producing a sensor arrangement
    WO2011113643A1|2011-09-22|Hydraulic pressure transmitter, pressure transducer having such a pressure transmitter and method for producing same
    WO2012055605A2|2012-05-03|Pressure transducer
    DE4315962C2|1996-03-14|Capsule for a pressure sensor and method for encapsulating the same
    DE10102355B4|2010-12-02|Method and device for producing a pressure detecting device
    DE102020118313A1|2022-01-13|Channel structures to optimize the membrane function of oil-filled pressure sensors
    DE10162044B4|2019-02-14|pressure transducers
    DE102017129792A1|2019-06-13|Modular construction kit for the production of pressure transducers
    EP0440011A2|1991-08-07|Force and/or measuring device
    EP1334343A1|2003-08-13|Pressure sensor and method for mounting the same
    DE102015206470A1|2016-10-13|Apparatus for determining a pressure and method of making the same
    EP2920495B1|2016-11-30|Sealing ring and pressure transducer with at least one such sealing ring
    EP0849577B1|2000-06-21|Membrane for determining the pressure
    DE69725020T2|2004-08-12|PRESSURE CONVERTER
    WO2009015779A1|2009-02-05|Diaphragm system for measuring pressure or sound, comprising a diaphragm protection
    同族专利:
    公开号 | 公开日
    DE102020118313A1|2022-01-13|
    CN113916407A|2022-01-11|
    US20220011187A1|2022-01-13|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    EP1207379A1|2000-11-15|2002-05-22|Endress + Hauser GmbH + Co. KG|Pressure sensor and its mounting procedure|
    DE102007056844A1|2007-11-23|2009-06-10|Endress + Hauser Gmbh + Co. Kg|Membrane bed for pressure transmission device of e.g. differential pressure transducer, has surface with spiral outline that serves as embossing pattern for flexible metallic and embossed membranes, where outline is obtained by die sinking|
    DE102014106703A1|2014-05-13|2015-11-19|Endress+Hauser Flowtec Ag|Sensor element and method for obtaining electrical energy from pressure differences, and vortex flow meter|
    EP3767266A1|2019-07-15|2021-01-20|VEGA Grieshaber KG|Pressure medium system or pressure transducer with integrated self-test|
    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    DE102020118313.5A|DE102020118313A1|2020-07-10|2020-07-10|Channel structures to optimize the membrane function of oil-filled pressure sensors|
    [返回顶部]